AeroBar MP 5635 Ionizing bar
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The AeroBar MP 5635 is a special ionizing bar designed for extremely clean environments, such as semiconductor manufacturing, where precise control of static charge and minimal contamination are critical. It uses modulated pulse (MP) technology, which combines high-frequency sine waves with pulse modulation to ensure effective ionization with excellent lateral uniformity.

This ionizing bar is particularly suitable for applications where low field voltages are required, such as advanced electronics assembly and nanotechnology manufacturing.

  • Ultra-clean design: It meets stringent cleanliness standards such as ISO 14644 Class 1 for particle-sensitive environments.
  • Emitter tips: Made of high-purity silicon that ensures compatibility with sensitive processes.
  • Users can fine-tune control parameters on the bar or use the user-friendly software to set optimal balance, voltage swing and discharge time.
  • Proximity capability: Can be mounted up to 150mm away from sensitive components such as wafers without compromising performance.
  • Additional features: Air assist for improved ion distribution, automatic balancing for precise static neutralization and alarm signals for operational feedback.
  • Installation is quick by simply plugging into a 24 V DC power source.
  • A compressed air line must be connected for air support.
  • An alarm output in the connection box enables connection to a machine or system controller or evaluation via a monitoring PC.
  • Compatible with all wafer technology concepts including 22 nm and below

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7500.AB-MP.18 - AeroBar MP 5635 Ionizing bar 350 mm
7500.AB-MP.18
AeroBar MP 5635 Ionizing bar 350 mm
34 mm
78 mm
450 mm
350 mm
8
50 mm
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7500.AB-MP.24 - AeroBar MP 5635 Ionizing bar 500 mm
7500.AB-MP.24
AeroBar MP 5635 Ionizing bar 500 mm
34 mm
78 mm
600 mm
500 mm
11
50 mm
-
7500.AB-MP.40 - AeroBar MP 5635 Ionizing bar 900 mm
7500.AB-MP.40
AeroBar MP 5635 Ionizing bar 900 mm
34 mm
78 mm
1000 mm
900 mm
13
75 mm
-
7500.AB-MP.45 - AeroBar MP 5635 Ionizing bar 1050 mm
7500.AB-MP.45
AeroBar MP 5635 Ionizing bar 1050 mm
34 mm
78 mm
1150 mm
1050 mm
15
75 mm
-
7500.AB-MP.63 - AeroBar MP 5635 Ionizing bar 1500 mm
7500.AB-MP.63
AeroBar MP 5635 Ionizing bar 1500 mm
34 mm
78 mm
1600 mm
1500 mm
31
75 mm
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